Edwards marked a milestone with the shipment of its 1,000th EZENITH integrated vacuum and exhaust management system.
Edwards Limited marked a milestone with the shipment of its 1,000th EZENITH integrated vacuum and exhaust management system, which will ship to a US-based semiconductor manufacturing fab in October 2014.
EZENITH reduces footprint by 30 percent and reduces the exhaust pipe lengths by up to 60 percent, compared to the size and cost of separate pump and abatement systems, according to the company. Each EZENITH installation is customized to meet the customer’s process-specific pumping and abatement requirements. Identical configurations are then proliferated to identical processes throughout the facility to ensure consistent performance
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