MKS Instruments has launched the I-Series of mass flow controllers designed for use in harsh environments where resistance to liquid or dust ingress (IP66 rated) is essential. Typical applications include biotech, pharmaceutical, food and beverage production where hose down may be required, as well as industrial glass production where moisture and/or dust is present.
The I-Series mass flow controllers are general purpose, metal or elastomer-sealed instruments available with either analog (0 to 5 VDC or 4 to 20 mA) or digital I/O. The devices incorporate the latest digital flow control electronics and a thermal sensor and mechanical design to provide 1 percent of set-point accuracy and precise control for full-scale flow rates from 5 sccm to 50 slm (I50) and from 100 to 250 slm (I250).
Multi-gas/multi-range capability, enabled through the device’s on board Ethernet interface, allows the user to change device gas and range reducing inventory requirements. The I-Series is available worldwide and is supported through MKS’ global sales and technical support organization.