Semi-Automatic Valve Manifold Boxes Feature Rail-Mounted Stick Design

Semi-Gas Systems, a provider of ultra-high purity gas source and distribution systems, offers a simplified line of semi-automatic valve manifold boxes that facilitate pressure regulated gas delivery to multiple points-of-use. With fewer components to potentially fail, Nanoturion single emergency shut off (ESO) semi-automatic valve manifold boxes (VMB) were designed to minimize production downtime, system maintenance and equipment costs. The VMBs are suitable for use in critical semiconductor, LED and research and development applications.

The units are available in four-, six- and eight-stick models. Individual process sticks are pressure regulated and the lines are isolated for localized gas control. To minimize human-system interaction and ensure the safest operating conditions, each unit includes a GigaGuard emergency shutdown system controller that continuously monitors system conditions and automatically interrupts gas flow in the event of an alarm. Emergency shutdown can also be operator activated via an abort button and/or via a remote shutdown input.

LED lights display constant system status and accompany an audible alarm to signal hazardous conditions. The controller’s 11 programmable inputs can be tailored to meet user-specific requirements and allow for supplemental network and communications.

The standard four-stick model is compact at 37 inches tall, 22 inches wide and 12 inches deep and includes a UL-approved fire sprinkler as well as integrated wall or rack mount attachment points. The enclosure is constructed of welded 11 Ga steel, with a ¼-inch thick safety glass window and a self-closing, self-latching door.

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Fluid handling
Product Type:
Semi-Gas Systems