The Veriflo division of Parker Hannifin has launched a miniature point-of-use pressure regulator that is designed for valve manifold box or panel applications - to distribute high purity gases to tools or locations in semiconductor fabs and high-technology manufacturing sites and laboratories. Despite a compact footprint of just 1.25 inches square (31.75 mm), the new VMB regulator offers excellent performance including a Cv of 0.1 and an ability to accommodate inlet pressures to 500 PSIG (35 BarG).
VMB is a threadless style, non-tied, double-diaphragm regulator for pressure control of high purity gases. Designed using the same dimensions as Veriflo's Quantum valves and SQMicro regulators, it allows gas suppliers and panel builders to provide compact gas handling equipment, to minimize the space required in clean room areas.
The pressure regulator is designed for reliability and long life, and employs a spherical poppet design that self-centers - for repeatable positive closure. It will accommodate inlet pressures up to 500 PSIG (35 BarG), and can be specified in versions with outlet pressure ranges of 1-30, 1-60, 2-100 or 3-250 PSIG (from 2 to 17 BarG). This broad operating range, combined with the relatively high Cv of 0.1, means that the VMB offers a versatile and high performance component for use in gas handling equipment, and one that can be purged rapidly.
Fabricated from 316L stainless steel, with Hastelloy C-22(r) diaphragms and an Inconel(r) poppet, the VMB is available with either tube stub or face seal connections. For extended reliability and life, the valve features a PCTFE seat. The standard surface finish (Ra value) is 10 micro-inch or less, with a 5 micro-inch finish or less available as an option. VMB operates over a -40 to +150 degrees F (-40 to +66 degrees C) temperature range.
A datasheet is available for download at www.veriflo.com.