Dow Corning announced that it has significantly ramped up production capacity for hexachlorodisilane (HCDS), and is working with global and local distributors to ensure its safe and efficient supply worldwide. HCDS is a high-purity precursor that is critical for a multitude of advanced, thin-film deposition processes for memory and logic semiconductor chip fabrication.
With this new high-volume capacity, Dow Corning can now meet or exceed the entire industry’s HCDS demand, according to the company. A stable, moisture sensitive liquid with low volatility, HCDS enables a low-temperature alternative to using silane or dichlorosilane to deposit high-quality silicon oxide and silicon nitride thin films.
For more information, contact: www.dowcorning.com