Flow Controllers Include Safe Delivery System Option

By Chemical Processing Staff

Sep 07, 2011

Brooks Instrument offers a new Safe Delivery System option for its GF120 mass flow controllers. The GF120 SDS is a low-pressure drop mass flow controller that delivers subatmospheric SDS gases used in implant and etch processes.
Subatmosphereic SDS gases are adsorbed onto a solid medium within the gas cylinder, remaining below atmospheric pressure despite containing up to 15 times more dopant than conventional pressurized sources. Most mass flow controllers require a 50 Torr differential pressure at flow rates of 5 sccm. But with that pressure drop, only about 65% of the dopant can be extracted. The GF120 SDS low-pressure operation enables a further 30% of the dopant to be extracted, according to Brooks Instrument.
The GF120 SDS models may also be used in other applications that require low pressure drop. These devices are available in full-scale flow ranges from 4 sccm to 1 slpm.

For more information, visit http://www.brooksinstrument.com.

Show Comments
Hide Comments

Join the discussion

We welcome your thoughtful comments.
All comments will display your user name.

Want to participate in the discussion?

Register for free

Log in for complete access.


No one has commented on this page yet.

RSS feed for comments on this page | RSS feed for all comments